From 2 November 2020, the autumn semester 2020 will take place online. Exceptions: Courses that can only be carried out with on-site presence. Please note the information provided by the lecturers via e-mail.

402-0317-00L  Semiconductor Materials: Fundamentals and Fabrication

SemesterAutumn Semester 2015
LecturersS. Schön, W. Wegscheider
Periodicityyearly recurring course
Language of instructionEnglish


AbstractThis course gives an introduction into the fundamentals of semiconductor materials. The main focus is on state-of-the-art fabrication and characterization methods. The course will be continued in the spring term with a focus on applications.
ObjectiveBasic knowledge of semiconductor physics and technology. Application of this knowledge for state-of-the-art semiconductor device processing
ContentFundamentals of Solid State Physics: Semiconductor materials, band structures, carrier statistics in intrinsic and doped seminconductors, p-n junctions, low-dimensional structures;
Bulk Material growth of Semiconductors: Czochralski method, floating zone method, high pressure synthesis;
Semiconductor Epitaxy: Fundamentals, MBE, MOCVD, LPE;
In situ characterization: RHEED, LEED, AES, XPS, process control (temperature, thickness)
Lecture noteshttps://moodle-app2.let.ethz.ch/course/view.php?id=1044